Problem Statement

The beauty of a sequence $a$ of length $n$ is defined as $a_1 \\oplus \\cdots \\oplus a_n$, where $\\oplus$ denotes the bitwise exclusive or (XOR).

You are given a sequence $A$ of length $N$. Snuke will insert zero or more partitions in $A$ to divide it into some number of non-empty contiguous subsequences.

There are $2^{N-1}$ possible ways to insert partitions. How many of them divide $A$ into sequences whose beauties are all equal? Find this count modulo $10^{9}+7$.

Constraints

• All values in input are integers.
• $1 \\leq N \\leq 5 \\times 10^5$
• $0 \\leq A_i < 2^{20}$

Input

Input is given from Standard Input in the following format:

$N$ $A_1$ $A_2$ $\\ldots$ $A_{N}$

Output

Print the answer.

Sample Input 1

3
1 2 3

Sample Output 1

3

Four ways of dividing $A$ shown below satisfy the condition. The condition is not satisfied only if $A$ is divided into $(1),(2),(3)$.

• $(1,2,3)$
• $(1),(2,3)$
• $(1,2),(3)$

Sample Input 2

3
1 2 2

Sample Output 2

1

Sample Input 3

32
0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0

Sample Output 3

147483634

Find the count modulo $10^{9}+7$.

Sample Input 4

24
1 2 5 3 3 6 1 1 8 8 0 3 3 4 6 6 4 0 7 2 5 4 6 2

Sample Output 4

292